Title:
LIGHT REFLECTION DEVICE AND DISTANCE MEASUREMENT APPARATUS PROVIDED WITH SAME
Document Type and Number:
WIPO Patent Application WO/2021/166096
Kind Code:
A1
Abstract:
A light reflection device (1) is provided with a reflector (3) having a reflection surface (7), a support body part (21), a twist drive beam (17), and a driving part (23). The twist drive beam (17) includes a silicon layer (5a) and a frequency characteristic adjustment film (31). On one surface of the silicon layer (5a), a metal wire (25) is formed with an insulative film (13) interposed therebetween. An insulative film (15) is formed to cover the metal wire (25). The frequency characteristic adjustment film (31) is formed to be in contact with the insulative film (15).
Inventors:
HIRATA YOSHIAKI (JP)
KONNO NOBUAKI (JP)
KAJIYAMA YOSHITAKA (JP)
KONNO NOBUAKI (JP)
KAJIYAMA YOSHITAKA (JP)
Application Number:
PCT/JP2020/006418
Publication Date:
August 26, 2021
Filing Date:
February 19, 2020
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
G01S7/481; G02B26/10
Domestic Patent References:
| WO2008038649A1 | 2008-04-03 | |||
| WO2019176204A1 | 2019-09-19 |
Foreign References:
| JP2005292321A | 2005-10-20 | |||
| JP2004191953A | 2004-07-08 | |||
| JP2010008609A | 2010-01-14 | |||
| US9128190B1 | 2015-09-08 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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