Title:
LIGHT SOURCE DEVICE, MICROSCOPIC APPARATUS, OPTICAL INSPECTION APPARATUS AND OPTICAL INSPECTION METHOD
Document Type and Number:
WIPO Patent Application WO/2022/141773
Kind Code:
A1
Abstract:
The present disclosure relates to a light source device, a microscopic apparatus, an optical inspection apparatus and an optical inspection method. The light source device comprises: an illumination light source, the illumination light source being configured to generate illumination light; and a diaphragm, the diaphragm being arranged on an emergent light path of the illumination light source. The diaphragm comprises: a light shielding screen, the light shielding screen being configured to block some of the illumination light; a first light transmitting portion, the first light transmitting portion being formed on the light shielding screen and covering the center of the diaphragm, and the first light transmitting portion being configured to make some of the illumination light transmit therethrough so as to form bright-field illumination; and a second light transmitting portion, the second light transmitting portion being formed on the light shielding screen and located on the periphery of the first light transmitting portion, and the second light transmitting portion being configured to make some of the illumination light transmit therethrough to form dark-field illumination.
Inventors:
FENG ZIYIN (CN)
JI MINBIAO (CN)
JI MINBIAO (CN)
Application Number:
PCT/CN2021/076825
Publication Date:
July 07, 2022
Filing Date:
February 19, 2021
Export Citation:
Assignee:
BIOACES SHANGHAI LIFE SCIENCE CO LTD (CN)
International Classes:
G01N21/64; G01J3/44; G01N21/01; G01N21/63; G02B13/00; G02B21/02; G02B27/09
Foreign References:
| CN103091840A | 2013-05-08 | |||
| CN101950083A | 2011-01-19 | |||
| CN110234771A | 2019-09-13 | |||
| CN111624841A | 2020-09-04 | |||
| CN108535944A | 2018-09-14 | |||
| CN108095704A | 2018-06-01 | |||
| CN104813160A | 2015-07-29 | |||
| CN111257274A | 2020-06-09 |
Attorney, Agent or Firm:
CCPIT PATENT AND TRADEMARK LAW OFFICE (CN)
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