Title:
LIGHT SOURCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/228629
Kind Code:
A1
Abstract:
Short circuiting between an electrode housing and a chamber due to debris solidification is minimized. A light source device according to one embodiment of the present invention comprises a light source unit, a chamber, and a shielding member. The light source unit has a disc-shaped first discharge electrode, a first electrode housing containing the first discharge electrode, a disc-shaped second discharge electrode, and a second electrode housing containing the second discharge electrode, and light of a predetermined wavelength is emitted by generating plasma of a conductive liquid raw material in a discharge region between the first discharge electrode and the second discharge electrode. The chamber contains the first electrode housing and the second electrode housing and has a first side wall to which the light source unit is fixed. The shielding member is installed on the inner wall surface of the first side wall and shields at least part of a gap formed between the light source unit and the first side wall.
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Inventors:
TERAMOTO YUSUKE (JP)
URAKAMI HIDEYUKI (JP)
YABUTA HIRONOBU (JP)
URAKAMI HIDEYUKI (JP)
YABUTA HIRONOBU (JP)
Application Number:
PCT/JP2023/015541
Publication Date:
November 30, 2023
Filing Date:
April 19, 2023
Export Citation:
Assignee:
USHIO ELECTRIC INC (JP)
International Classes:
G03F7/20; H05G2/00
Foreign References:
| JP2022063390A | 2022-04-22 | |||
| JP2014527264A | 2014-10-09 | |||
| JP2008544448A | 2008-12-04 | |||
| JP2021516774A | 2021-07-08 |
Attorney, Agent or Firm:
KIMURA Masayoshi (JP)
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