LIGHTING OPTICAL SYSTEM, EXPOSURE SYSTEM, AND DEVICE PRODUCTION METHOD

Title:

LIGHTING OPTICAL SYSTEM, EXPOSURE SYSTEM, AND DEVICE PRODUCTION METHOD

Document Type and Number:

WIPO Patent Application WO/2007/111146

Kind Code:

A1

Abstract:

A lighting optical system capable of keeping a desired profile even if the outline shape of a light intensity distribution formed on a lighting pupil surface is varied using an axicon system. The lighting optical system, illuminating a surface to be illuminated (M) based on light from a light source (1), comprises a prism system (6) for varying the interval between a pair of prisms (6a, 6b) along an optical axis (AX) to vary a light intensity distribution at a lighting pupil surface (8a), and one or a plurality of movable lens(es) (4b) disposed between the prism system and the surface to be illuminated to be able to move in the optical axis direction according to a variation in the interval along the optical axis of the pair of the prisms.

Inventors:

TANAKA HIROHISA (JP)

Application Number:

PCT/JP2007/055237

Publication Date:

October 04, 2007

Filing Date:

March 15, 2007

Export Citation:

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Assignee:

NIKON CORP (JP)
TANAKA HIROHISA (JP)

International Classes:

H01L21/027; G02B15/14; G02B19/00; G03F7/20

Domestic Patent References:

WO2005026843A2

2005-03-24

Foreign References:

JP2005228846A	2005-08-25
JP2002015987A	2002-01-18
JPH08328261A	1996-12-13
JP2002231619A	2002-08-16

Other References: