LIGHTING OPTICAL SYSTEM AND SUBSTRATE INSPECTING DEVICE

WIPO Patent Application WO/2021/205650

A1

This lighting optical system comprises a laser light source 301, 401, 501, a light collection optical system 311, 411, 511, and a support structure 312, 412 that is able to secure the laser light source and the light collection optical system, wherein the light from the laser light source is focused onto an object to be inspected 307, 407, 507. The light collection optical system comprises a cylindrical mirror 306, 406, 506, and at least one cylindrical lens 304, 404a, 404b, 404c, 504a, 504b, 504c. The cylindrical mirror is an optical element that collects light in a first direction, and the cylindrical lens is an optical element that collects light in a second direction perpendicular to the first direction. The focal distance of the cylindrical lens to the object to be inspected is greater than the focal distance of the cylindrical mirror to the object to be inspected.

JP2022526326	How to determine the color value of a transparent bulk material
WO/2020/193263	MEASUREMENT LIGHT SOURCE AND MEASURING ARRANGEMENT FOR DETECTING A REFLECTION SPECTRUM
JP2006170998	TENSION MEANS TRANSMITTING DEVICE, METHOD OF MEASURING ABRASION OF ENDLESS TENSION MEANS, AND ENDLESS TENSION MEANS FOR SUCH A TENSION TRANSMISSION DEVICE

IWAMATSU AKIHIRO (JP)
MATSUMOTO SHUNICHI (JP)
YAMAMOTO MASAYA (JP)

PCT/JP2020/016116

October 14, 2021

April 10, 2020

Click for automatic bibliography generation  

HITACHI HIGH TECH CORP (JP)

G01N21/84; G02B19/00; G01N21/956; G02B27/09

WO2013136574A1	2013-09-19
WO2006133206A1	2006-12-14

JP2013532841A	2013-08-19
JP2015004619A	2015-01-08
JP2012098103A	2012-05-24
JP2008275540A	2008-11-13
JPS59216118A	1984-12-06
JPH0526818A	1993-02-02

HIRAKI & ASSOCIATES (JP)

View/Download PDF      PDF Help

Previous Patent: ENDOSCOPE COVER SYSTEM AND ENDOSCOPE COVER

Next Patent: INFORMATION PROCESSING SYSTEM, INFORMATION PROCESSING METHOD, DATA PROCESSING DEVICE, AND PROGRAM