Title:
LIQUID EJECTION METHOD AND APPARATUS FOR TEMPERATURE CONTROL UNIT
Document Type and Number:
WIPO Patent Application WO/2008/004352
Kind Code:
A1
Abstract:
A method of liquid ejection for temperature control unit, wherein in the instance
of temperature control of temperature control object to a first temperature
not higher than room temperature, a refrigerant is circulated so that the refrigerant
together with a heater engages in the temperature control of the temperature
control object; and wherein in the instance of temperature control of the temperature
control object to a second temperature higher than room temperature, circulation
of the refrigerant is discontinued so that the temperature control of the temperature
control object is performed by a heater. In the method of liquid ejection for temperature
control unit, in the event of changing of the set temperature of the temperature
control object from the first temperature to the second temperature, when the
temperature of the refrigerant is increased and reaches a first given temperature
not higher than the boiling point of the refrigerant, the circulation of the refrigerant
is discontinued, and air or an inert gas is fed to the refrigerant circulation
line, thereby ejecting the refrigerant from within the temperature control
object. Simultaneously, the temperature rise of the temperature control object
is continued by the heater. When the temperature of the temperature control object
is increased and reaches a second given temperature higher than the boiling point
of the refrigerant, once more, air or an inert gas is fed to the refrigerant circulation
line, thereby ejecting any refrigerant remaining within the temperature control
object.
Inventors:
YANAGIDA AKIHITO (JP)
FUJITA TAICHI (JP)
FUJITA TAICHI (JP)
Application Number:
PCT/JP2007/052871
Publication Date:
January 10, 2008
Filing Date:
February 16, 2007
Export Citation:
Assignee:
SUMITOMO HEAVY INDUSTRIES (JP)
TOKYO SEIMITSU CO LTD (JP)
YANAGIDA AKIHITO (JP)
FUJITA TAICHI (JP)
TOKYO SEIMITSU CO LTD (JP)
YANAGIDA AKIHITO (JP)
FUJITA TAICHI (JP)
International Classes:
F25D17/02; F25D16/00; H01L21/66; H01L21/683
Foreign References:
| JP2003148852A | 2003-05-21 | |||
| JP2001004718A | 2001-01-12 | |||
| JPH11249747A | 1999-09-17 | |||
| JP2005089864A | 2005-04-07 | |||
| JPH07251069A | 1995-10-03 |
Attorney, Agent or Firm:
ITOH, Tadahiko (Yebisu Garden Place Tower20-3, Ebisu 4-Chome, Shibuya-Ku, Tokyo 32, JP)
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