LOADING TABLE AND HEAT TREATING APPARATUS HAVING THE LOADING TABLE

Title:

LOADING TABLE AND HEAT TREATING APPARATUS HAVING THE LOADING TABLE

Document Type and Number:

WIPO Patent Application WO/2004/090960

Kind Code:

A1

Abstract:

A heat treating apparatus, wherein a treated body (W) is placed on the upper surface of a loading table (32) which is erected from the bottom part of a treatment container (4) through a column and in which a heating means (38) is buried and a specified heat treatment is applied to the treated body. Insulating cover members (72), (74), and (76) are installed on the upper surface, side surface, and lower surface of the loading table. Thus, since metallic atoms causing contamination can be prevented from being thermo-diffused from the loading table, various contaminations such as metallic contamination and organic substance contamination can be prevented from occurring.

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Inventors:

KAWASAKI HIROO (JP)
IWATA TERUO (JP)
AMIKURA MANABU (JP)

Application Number:

PCT/JP2004/005036

Publication Date:

October 21, 2004

Filing Date:

April 07, 2004

Export Citation:

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Assignee:

TOKYO ELECTRON LTD (JP)
KAWASAKI HIROO (JP)
IWATA TERUO (JP)
AMIKURA MANABU (JP)

International Classes:

C23C16/458; H01L21/00; H01L21/687; (IPC1-7): H01L21/205; H01L21/31

Foreign References:

JPH09186112A	1997-07-15
JPH0945624A	1997-02-14
JPH05299369A	1993-11-12
JPH05267309A	1993-10-15
JPH06260430A	1994-09-16
US6342691B1	2002-01-29

Other References: