Title:
MACHINE TOOL
Document Type and Number:
WIPO Patent Application WO/2023/233607
Kind Code:
A1
Abstract:
The present invention comprises: a frequency swept light output unit (421) that outputs frequency swept light; an optical branching unit (422) that branches the frequency swept light outputted by the frequency swept light output unit (421) into reference light and irradiation light; a sensor head unit (41) that irradiates a machined surface (101) of a workpiece (10) after machining with the irradiation light obtained by the optical branching unit (422) and receives the reflected light by the machined surface (101); an optical interference unit (423) that generates interference light between the reference light and the reflected light on the basis of the reference light obtained by the optical branching unit (422) and the reflected light received by the sensor head unit (41), and converts the interference light into an electrical signal; an A/D converter (424) that converts the electrical signal obtained by the optical interference unit (423) from an analog signal to a digital signal; a distance information calculation unit (425) that calculates information relating to the distance from the leading end of the sensor head (41) to the machined surface (101) of the workpiece (10) after machining on the basis of the digital signal obtained by the A/D converter (424); and a roughness measurement unit (426) that measures the surface roughness of the machined surface (101) of the workpiece (10) after machining on the basis of the result of the calculation by the distance information calculation unit (425).
Inventors:
GOTO HIROKI (JP)
Application Number:
PCT/JP2022/022411
Publication Date:
December 07, 2023
Filing Date:
June 02, 2022
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
G01B11/30; B23Q17/24; G01B9/02004
Domestic Patent References:
| WO2019239491A1 | 2019-12-19 | |||
| WO2020070884A1 | 2020-04-09 |
Foreign References:
| JP2014123669A | 2014-07-03 | |||
| JPH0378609A | 1991-04-03 | |||
| US20210349213A1 | 2021-11-11 |
Attorney, Agent or Firm:
SANNO PATENT ATTORNEYS OFFICE (JP)
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