MAGNETIC LEVITATION ROTATING APPARATUS AND MAGNETIC LEVITATION ROTATING METHOD

WIPO Patent Application WO/2023/113262

A1

The present invention relates to a magnetic levitation rotating apparatus and a magnetic levitation rotating method capable of stable magnetic levitation rotation by compensating for a rotation error of a rotating unit, the magnetic levitation rotating apparatus comprising: a hollow rotating unit which levitates by means of magnetic force and rotates around a rotary shaft; a fixing unit provided outside the rotating unit so as to be horizontally spaced apart from the rotating unit, and comprising a permanent magnet for generating an attractive force on the rotating unit, and a horizontal position control coil which controls the horizontal position of the rotating unit by generating magnetic flux and adjusting the attractive force; a horizontal displacement sensor unit for measuring a horizontal displacement value of the rotating unit; a displacement value correction unit for correcting the measured horizontal displacement value of the rotating unit according to the shape tolerance of the rotating unit; a control unit which outputs a current output value for controlling the horizontal position of the rotating unit according to the corrected horizontal displacement value to be inputted; and a power supply unit which receives the current output value and provides a control current to the horizontal position control coil.

MOON YONG SOO (KR)
KIM CHANG KYO (KR)
JI SANG HYUN (KR)

PCT/KR2022/018140

June 22, 2023

November 16, 2022

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AP SYSTEMS INC (KR)

H01F7/02; H01L21/687

KR19990067113A	1999-08-16
KR20120030564A	2012-03-28
KR100726016B1	2007-06-08
KR20170041652A	2017-04-17
JP2013139844A	2013-07-18

AHN, Joon-Hyung et al. (KR)

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