Title:
MAGNETIC LEVITATION ROTATION APPARATUS AND SUBSTRATE PROCESSING APPARATUS USING SAME
Document Type and Number:
WIPO Patent Application WO/2023/113261
Kind Code:
A1
Abstract:
The present invention relates to a magnetic levitation rotation apparatus wherein a rotary part is capable of stable magnetic levitation rotation, and a substrate processing apparatus comprising same. The magnetic levitation rotation apparatus may comprise: a housing part including a cylindrical inner wall, a cylindrical outer wall provided outside the inner wall, and a bottom portion connecting the inner wall and the outer wall; a cylindrical rotary part accommodated in an accommodation space between the inner wall and the outer wall of the housing part, and floating by means of a magnetic force to rotate about a vertical axis; a fixing part provided on the outer side of the outer wall and providing a magnetic force to the rotary part; and a plurality of horizontal displacement sensor parts mounted on the fixing part and measuring the horizontal displacement of the rotary part.
Inventors:
MOON YONG SOO (KR)
KIM CHANG KYO (KR)
JI SANG HYUN (KR)
KIM CHANG KYO (KR)
JI SANG HYUN (KR)
Application Number:
PCT/KR2022/018139
Publication Date:
June 22, 2023
Filing Date:
November 16, 2022
Export Citation:
Assignee:
AP SYSTEMS INC (KR)
International Classes:
H01L21/687; H01F7/02; H01L21/67
Foreign References:
| KR20180021220A | 2018-02-28 | |||
| JP2001351874A | 2001-12-21 | |||
| US5818137A | 1998-10-06 | |||
| KR20200018317A | 2020-02-19 | |||
| CN106571321A | 2017-04-19 |
Attorney, Agent or Firm:
AHN, Joon-Hyung et al. (KR)
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