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Title:
MAGNETIC SENSOR DEVICE AND METHOD OF MANUFACTURE THEREOF
Document Type and Number:
WIPO Patent Application WO/2016/013438
Kind Code:
A1
Abstract:
This magnetic sensor device is provided with: a substrate (2) that has a magnetoresistive effect element (1) mounted thereon; a magnet (3) that forms a bias magnetic field for the magnetoresistive effect element (1); an enclosure (4) that has formed therein an opening (4a) facing a conveyance path along which an object (6) to be detected including a magnetic component is conveyed, and that also has a housing portion (4h) housing the substrate (2) and the magnet (3), with the magnetoresistive effect element (1) being disposed on the side of the substrate (2) facing the conveyance path; and a cover (5) that covers the surface of the housing portion (4h) on the side thereof adjacent to the opening (4a). The enclosure (4) has formed therein step portions (4b) and grooves (4c) continuous with the step portions (4b), wherein the substrate (2) is supported at opposite sides thereof on the step portions (4b) in such a manner that the substrate (2) lies on the side of the opening (4a) facing the conveyance path and extends in the direction (7) of conveyance of the object (6) to be detected, and wherein the grooves (4c) extend from the opening (4a) in the direction (7) of conveyance to an outside surface of the enclosure (4).

Inventors:
OKADA MASAAKI (JP)
MATSUI HIDEKI (JP)
OGOMI TOMOKAZU (JP)
YOSHIOKA SADAAKI (JP)
Application Number:
PCT/JP2015/070035
Publication Date:
January 28, 2016
Filing Date:
July 13, 2015
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
G01R33/02; G01R33/09; G07D7/00; G07D7/04; H01L43/08
Domestic Patent References:
WO2009099173A12009-08-13
WO2012137543A12012-10-11
Foreign References:
JPH09133743A1997-05-20
JP2011022035A2011-02-03
JPH04127584U1992-11-20
JP2010175490A2010-08-12
JP2012098095A2012-05-24
Attorney, Agent or Firm:
KIMURA MITSURU (JP)
Mitsuru Kimura (JP)
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