Title:
MAGNETIC SENSOR
Document Type and Number:
WIPO Patent Application WO/2021/100252
Kind Code:
A1
Abstract:
[Problem] To provide a compact magnetic sensor capable of a closed-loop control. [Solution] A magnetic sensor 1 equipped with: a sensor chip 20 mounted to a surface 11 of a substrate 10 in a manner such that an element-forming surface maintains a prescribed slope or perpendicular angle relative to the surface 11 of the substrate 10; an external magnetic body 31 which is mounted to the surface 11 of the substrate 10 and collects in a magnetosensitive element the magnetism of a magnetic field to be detected; and a compensating coil 41 which is wound around the external magnetic body 31. As a result of the compensating coil 41 being wound around the external magnetic body 31 in this manner, it is possible to cancel the magnetic field imparted to the magnetosensitive element, and to prevent the magnetic saturation of the external magnetic body 31.
Inventors:
AKUSHICHI TAIJU (JP)
KAMENO MAKOTO (JP)
KASAJIMA TAMON (JP)
KAMENO MAKOTO (JP)
KASAJIMA TAMON (JP)
Application Number:
PCT/JP2020/029194
Publication Date:
May 27, 2021
Filing Date:
July 30, 2020
Export Citation:
Assignee:
TDK CORP (JP)
International Classes:
H01L43/08; G01R33/02
Domestic Patent References:
| WO2017077870A1 | 2017-05-11 |
Foreign References:
| JP2018004618A | 2018-01-11 | |||
| JP2019174140A | 2019-10-10 | |||
| JP2019174438A | 2019-10-10 | |||
| JP2019132719A | 2019-08-08 | |||
| JPH09113592A | 1997-05-02 | |||
| JP2003139828A | 2003-05-14 | |||
| JP2020071198A | 2020-05-07 | |||
| JP2018179738A | 2018-11-15 |
Other References:
See also references of EP 4064374A4
Attorney, Agent or Firm:
WASHIZU Mitsuhiro et al. (JP)
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