Title:
MAGNETIC SUSPENSION PLANAR MOTOR WORKBENCH WITH DOUBLE-LAYER WINDING COARSE-FINE DRIVE
Document Type and Number:
WIPO Patent Application WO/2023/226272
Kind Code:
A1
Abstract:
Disclosed in the present invention is a magnetic suspension planar motor workbench with double-layer winding coarse-fine drive, relating to the technical field of planar motors. The workbench comprises a stator and a mover, wherein vertical magnetized permanent magnets and horizontal magnetized permanent magnets in the stator are arranged in a Halbach mode; and the mover is positioned on a strengthened side of an air gap magnetic field above the stator. The mover employs double-layer coil windings with different heights, and a first winding on an upper layer has a smaller height than a second winding on a lower layer. Each layer of winding can generate drive forces in six directions to realize six-degree-of-freedom drive. In a variable speed movement stage, the high-acceleration and low-precision movement control is realized by generating a large drive force through the second winding on the lower layer; and in a uniform linear movement stage, uniform movement is realized by generating a drive force with high precision and small fluctuation through the first winding on the upper layer. The present invention can reduce the output fluctuation in a movement process and improve the movement precision, and has a good workbench stability, a small tracking error, and high positioning precision.
Inventors:
ZENG LIZHAN (CN)
LIU KAI (CN)
ZHAO SHUO (CN)
CHEN FUXIANG (CN)
HU AOQI (CN)
ZHANG HAO (CN)
CHEN XUEDONG (CN)
LIU KAI (CN)
ZHAO SHUO (CN)
CHEN FUXIANG (CN)
HU AOQI (CN)
ZHANG HAO (CN)
CHEN XUEDONG (CN)
Application Number:
PCT/CN2022/123698
Publication Date:
November 30, 2023
Filing Date:
October 04, 2022
Export Citation:
Assignee:
UNIV HUAZHONG SCIENCE TECH (CN)
International Classes:
H02K41/035; H02K1/17; H02K3/04; H02K3/28
Foreign References:
| CN114825854A | 2022-07-29 | |||
| CN204271955U | 2015-04-15 | |||
| CN102097982A | 2011-06-15 | |||
| CN203520012U | 2014-04-02 | |||
| CN101527484A | 2009-09-09 | |||
| JPH0917847A | 1997-01-17 |
Attorney, Agent or Firm:
HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY PATENT AGENCY CENTER (CN)
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