MANUFACTURING APPARATUS AND MANUFACTURING METHOD FOR CARBON NANOTUBE

WIPO Patent Application WO/2021/029212

A1

Provided are a manufacturing apparatus and a manufacturing method for a carbon nanotube, which can achieve high-temperature heating of a catalyst raw material in a floating catalyst chemical vapor deposition (FCCVD) method, and can improve the quality and the yield of synthesized carbon nanotubes.　The manufacturing apparatus 1 for a carbon nanotube comprises: a synthesis furnace 2 that synthesizes a carbon nanotube; a catalyst raw material supply nozzle 3 that supplies, to the synthesis furnace 2, a catalyst raw material for synthesizing the carbon nanotube; and a nozzle temperature adjustment means 6 which can set the temperature of a cavity part 4 of the catalyst raw material supply nozzle 3 to be higher than the temperature of a reaction field 5 of the synthesis furnace 2. The catalyst raw material is heated to a temperature at which catalyst metal is not condensed, the thermally decomposed catalyst raw material is supplied to the synthesis furnace 2, and the thermally decomposed catalyst raw material is rapidly cooled to the CVD temperature in the synthesis furnace 2 to generate fine catalyst metal particles at high density in a space of the reaction field 5, so that the carbon nanotube having a small diameter can be vapor-phase-grown at high density.

NODA SUGURU (JP)
NAMIKI KATSUYA (JP)
ZHANG ZIHAO (JP)
OSAWA TOSHIO (JP)
SUGIME HISASHI (JP)

PCT/JP2020/028754

February 18, 2021

July 27, 2020

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UNIV WASEDA (JP)
MEIJO NANO CARBON CO LTD (JP)

C01B32/162; B82Y40/00; C01B32/159

WO2010008046A1	2010-01-21
WO2017010523A1	2017-01-19
WO2012015044A1	2012-02-02
WO2006013706A1	2006-02-09

JP2007527844A	2007-10-04
US20160236937A1	2016-08-18

USHIKI & ASSOCIATES (JP)

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