Title:
MANUFACTURING METHOD FOR RESONATOR AND RESONATOR
Document Type and Number:
WIPO Patent Application WO/2021/109090
Kind Code:
A1
Abstract:
A manufacturing method for a resonator and the resonator. A manufacturing method (S10) for a resonator (100) comprises: a cavity (10) forming step (S11): providing a base layer material (1), forming the cavities (10) from the top surface of the base layer material (1), and depositing a first sacrificial layer (11) in each cavity (10); a release groove (30) forming step (S12): depositing and forming first bottom electrodes (21) corresponding to the cavities (10) on the top surface of the base layer material (1) and forming the release groove (30) located on the first bottom electrodes (21), enabling at least part of projection of the release groove (30) to be on the cavities (10), and depositing a second sacrificial layer (3) in the release groove (30); a release hole (40) forming step (S13): forming a piezoelectric layer (4) on the base layer material (1) and the first bottom electrode (21), forming, in the piezoelectric layer (4), a release hole (40) penetrating through the piezoelectric layer, and enabling at least part of projection of the release hole (40) to be on the release groove (30); and etching and releasing the first sacrificial layers (11) and the second sacrificial layer (3) by means of the release hole (40) to obtain the resonator (100). When the resonator (100) is manufactured, the release groove (30) is not required to extend outwards from the edges of the cavities (10), and the volumes, which are required to be released, of the cavities (10) are reduced, thereby effectively improving the release efficiency of the sacrificial layer.
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| WO/2007/063842 | ACOUSTIC RESONATOR AND ITS FABRICATING METHOD |
| JP5413025 | Manufacturing method of composite substrate |
Inventors:
CHENG SHIYANG (CN)
WU KE (CN)
LI YANG (CN)
WANG CHAO (CN)
WU KE (CN)
LI YANG (CN)
WANG CHAO (CN)
Application Number:
PCT/CN2019/123412
Publication Date:
June 10, 2021
Filing Date:
December 05, 2019
Export Citation:
Assignee:
AAC ACOUSTIC TECH SHENZHEN CO LTD (CN)
AAC TECHNOLOGIES PTE LTD (SG)
AAC TECHNOLOGIES PTE LTD (SG)
International Classes:
H03H3/02; H03H9/17
Domestic Patent References:
| WO2007119643A1 | 2007-10-25 |
Foreign References:
| CN109560789A | 2019-04-02 | |||
| US20120205754A1 | 2012-08-16 | |||
| CN110011632A | 2019-07-12 | |||
| CN107196618A | 2017-09-22 |
Attorney, Agent or Firm:
GUANGZHOU YUEXIU JILY PATENT & TRADEMARK LAW OFFICE (CN)
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