Title:
MASS FLOW SENSOR, MASS FLOW METER PROVIDED WITH MASS FLOW SENSOR, AND MASS FLOW CONTROLLER PROVIDED WITH MASS FLOW SENSOR
Document Type and Number:
WIPO Patent Application WO/2018/180387
Kind Code:
A1
Abstract:
To provide a mass flow sensor with reduced zero-point fluctuation, a mass flow meter provided with the mass flow sensor, and a mass flow controller provided with the mass flow sensor, this mass flow sensor 20 is provided with a U-shaped flow pipe 23 within which fluid flows from one end (first end part 21) thereof to the other end (second end part 22) thereof and that has a bottom part and two linear parts (linear part 22B, linear part 22A) that connect the bottom part to the end parts (first end part 21, second end part 22), a first thermosensitive resistor 24 that is wrapped around one of the linear parts (linear part 22B or linear part 22A), a second thermosensitive resistor 25 that is provided so as to be removed from the first thermosensitive resistor 24 toward an end part (second end part 22 or first end part 21) and is wrapped around the linear part (linear part 22B or linear part 22A) that the first thermosensitive resistor 24 is wrapped around, and a heat dissipation part 26 that is provided so as to touch the flow pipe 23 on the side of the first thermosensitive resistor 24 opposite from the second thermosensitive resistor 25.
Inventors:
SHIMIZU TSUNEHISA (JP)
Application Number:
PCT/JP2018/009338
Publication Date:
October 04, 2018
Filing Date:
March 09, 2018
Export Citation:
Assignee:
FUJIKIN KK (JP)
International Classes:
G01F1/684; G01F1/00; G05D7/06
Foreign References:
| JP5505419B2 | 2014-05-28 |
Attorney, Agent or Firm:
SAKAMOTO Tomohiro (JP)
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