Title:
MASS TRANSFER DEVICE AND SYSTEM, AND CONTROL METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2021/232452
Kind Code:
A1
Abstract:
Disclosed are a mass transfer device and system, and a control method therefor. The mass transfer device comprises: a light beam emitting assembly, a rotating lens (3) and a rotating lens adjustment assembly, wherein the rotating lens (3) is used for receiving a light beam emitted by the light beam emitting assembly; and the rotating lens adjustment assembly is connected to the rotating lens (3), is used for controlling the rotating lens (3) to rotate circumferentially, and is further used for adjusting the radius of rotation of the rotating lens (3). According to the mass transfer device, the rotating lens adjustment assembly is adjusted to change the path of the rotating lens (3) and thus the path of a light spot emitted by the rotating lens (3) is adjusted. The path of the light spot can be adjusted by means of adjusting the radius of rotation of the rotating lens (3), that is, it is only necessary to control a one-axis element of the rotating lens (3), which is easier to control than a traditional method wherein the precision of a two-axis element needs to be controlled, thereby improving the control precision of the mass transfer device.
Inventors:
JIANG GUANGPING (CN)
XU SHIYUAN (CN)
XU SHIYUAN (CN)
Application Number:
PCT/CN2020/092432
Publication Date:
November 25, 2021
Filing Date:
May 26, 2020
Export Citation:
Assignee:
CHONGQING KONKA PHOTOELECTRIC TECH RESEARCH INSTITUTE CO LTD (CN)
International Classes:
H01L21/268
Foreign References:
| CN109545815A | 2019-03-29 | |||
| CN107390392A | 2017-11-24 | |||
| KR20130042894A | 2013-04-29 | |||
| JP2010278051A | 2010-12-09 |
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