Title:
MEMBER PROCESSING METHOD
Document Type and Number:
WIPO Patent Application WO/2023/243636
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a method for processing a member that is provisionally affixed on a supporting plate with versatility, the method being capable of forming an alignment mark in an arbitrary position in an arbitrary step. The present invention provides a method for processing a member that is provisionally affixed on a supporting plate 21. The processing method according to the present invention includes the following steps. A step for preparing an adhesive sheet 1B that contains a color change component, the color of which can be changed by means of external stimuli; a step for affixing the adhesive sheet 1B on a supporting plate 21; a step for providing the adhesive sheet 1B with an alignment mark 23 by applying an external stimulus to a predetermined position of the adhesive sheet 21, which has been affixed on the supporting plate 21; and a step for provisionally affixing a member on the adhesive sheet 1B, which has been affixed on the supporting plate 21.
Inventors:
OCHI GENKI (JP)
MIZUNO DAISUKE (JP)
OZAKI MAYU (JP)
MIZUNO DAISUKE (JP)
OZAKI MAYU (JP)
Application Number:
PCT/JP2023/021944
Publication Date:
December 21, 2023
Filing Date:
June 13, 2023
Export Citation:
Assignee:
NITTO DENKO CORP (JP)
International Classes:
H01L21/02; C09J7/38; C09J201/00; H01L21/301
Foreign References:
| JP2000223446A | 2000-08-11 | |||
| JP2014192184A | 2014-10-06 | |||
| JP2004193399A | 2004-07-08 | |||
| JP2004002840A | 2004-01-08 |
Attorney, Agent or Firm:
G-CHEMICAL INTELLECTUAL PROPERTY FIRM (JP)
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