Title:
MEMBER FOR SEMICONDUCTOR MANUFACTURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/004148
Kind Code:
A1
Abstract:
A wafer mounting stand 10 comprises: a ceramic plate 20; a conductive base plate 30; a gas common passage 54 that is provided inside the base plate 30; a plurality of gas outflow passages 56 that are provided so as to reach a wafer mounting surface from the gas common passage 54; a gas inflow passage 52 that is provided so as to achieve communication with the gas common passage 54 from a lower surface of the base plate 30; and an insulating sleeve 60 that is disposed in a base plate through hole 31 and that is one member which cannot be separated. The insulating sleeve 60 has a first communication hole 64 that constitutes a portion of the gas common passage 54, and a second communication hole 66 that is provided so as to reach an upper surface of the insulating sleeve 60 from the first communication hole 64, and that constitutes a portion of the gas outflow passages 56.
Inventors:
KOJIMA MITSURU (JP)
TAKEBAYASHI HIROSHI (JP)
WAKI JYUNYA (JP)
TAKEBAYASHI HIROSHI (JP)
WAKI JYUNYA (JP)
Application Number:
PCT/JP2022/026286
Publication Date:
January 04, 2024
Filing Date:
June 30, 2022
Export Citation:
Assignee:
NGK INSULATORS LTD (JP)
International Classes:
H01L21/683; H01L21/3065
Domestic Patent References:
| WO2018230446A1 | 2018-12-20 | |||
| WO2020153449A1 | 2020-07-30 |
Foreign References:
| JP2020057786A | 2020-04-09 | |||
| JP2009070836A | 2009-04-02 | |||
| JP2019117861A | 2019-07-18 | |||
| US20200105568A1 | 2020-04-02 |
Attorney, Agent or Firm:
ITEC INTERNATIONAL PATENT FIRM (JP)
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