Title:
MEMS MICROPHONE AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2023/087647
Kind Code:
A1
Abstract:
An MEMS microphone and a manufacturing method therefor. The MEMS microphone comprises: a substrate (110); a backplate (130) arranged on the substrate (110); a plurality of support columns (144) arranged on the substrate (110); and a diaphragm (150) arranged on the support columns (144), wherein each of the support columns (144) is used for supporting the diaphragm (150); the diaphragm (150) is provided with an air hole (151), and penetrates the diaphragm (150); an airflow channel is formed in a space located between the diaphragm (150) and the backplate (130) and provided with no support column (144); the substrate (110) directly below the backplate (130) is not provided with a cavity; and the backplate (130) and the diaphragm (150) form a capacitor.
Inventors:
LENG HUAXING (CN)
Application Number:
PCT/CN2022/094592
Publication Date:
May 25, 2023
Filing Date:
May 24, 2022
Export Citation:
Assignee:
CSMC TECHNOLOGIES FAB2 CO LTD (CN)
International Classes:
H04R19/04
Domestic Patent References:
| WO2011068344A2 | 2011-06-09 |
Foreign References:
| US20050152571A1 | 2005-07-14 | |||
| CN111405444A | 2020-07-10 | |||
| CN109987573A | 2019-07-09 |
Attorney, Agent or Firm:
ADVANCE CHINA IP LAW OFFICE (CN)
Download PDF: