Title:
MEMS MIRROR DEVICE AND DISTANCE MEASURING DEVICEE
Document Type and Number:
WIPO Patent Application WO/2022/162828
Kind Code:
A1
Abstract:
This MEMS mirror device (1) comprises a fixed member (10), a movable member rotatably coupled to the fixed member (10), a mirror (12), and wiring lines (40a, 40b, 48a, 48b). The movable member includes a movable plate (11), torsion beams (14, 17), and meandering beams (15, 18). The meandering beams (15, 18) are disposed along the torsion beams (14, 17). The mirror (12) is formed on the movable plate (11). The wiring lines (40a, 40b, 48a, 48b) extend from the movable plate (11) to the fixed member (10). The wiring lines (40a, 40b, 48a, 48b) are formed on the meandering beams (15, 18).
Inventors:
HIRATA YOSHIAKI (JP)
KONNO NOBUAKI (JP)
KAJIYAMA YOSHITAKA (JP)
KONNO NOBUAKI (JP)
KAJIYAMA YOSHITAKA (JP)
Application Number:
PCT/JP2021/003019
Publication Date:
August 04, 2022
Filing Date:
January 28, 2021
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
G02B26/10; B81B3/00; G01S7/481; G02B26/08
Domestic Patent References:
| WO2017183368A1 | 2017-10-26 |
Foreign References:
| JP2015031786A | 2015-02-16 | |||
| JP2016224211A | 2016-12-28 | |||
| US20170052363A1 | 2017-02-23 |
Attorney, Agent or Firm:
FUKAMI PATENT OFFICE, P.C. (JP)
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