Title:
MEMS SWITCH AND MANUFACTURING METHOD FOR MEMS SWITCH
Document Type and Number:
WIPO Patent Application WO/2022/153697
Kind Code:
A1
Abstract:
This MEMS switch comprises: a substrate that has a first main surface and a second main surface on the opposite side thereof, and also has a cavity formed therein; an actuator unit that is formed on the first main surface side of the substrate and converts an electric signal to a mechanical action; a movable contact part that is formed, in a floating state in the cavity, on the first main surface side of the substrate, and can be displaced by the mechanical action of the actuator unit; and a fixed contact part that faces the movable contact part, and can be set to be in contact with or non-contact with the movable contact part by the displacement of the movable contact part, wherein at least one of the movable contact part and the fixed contact part has a first structure in which are included the substrate, a first insulating layer that is formed on the substrate, a second insulating layer that is formed on the first insulating layer so as to cover an end surface of the first insulating layer along the thickness direction of the substrate, and that contains a material different from that of the first insulating layer, and a conductive contact layer that is supported by the first insulating layer.
Inventors:
MATSUSHIMA OSAMU (JP)
Application Number:
PCT/JP2021/043956
Publication Date:
July 21, 2022
Filing Date:
November 30, 2021
Export Citation:
Assignee:
ROHM CO LTD (JP)
International Classes:
H01H57/00; H01H59/00
Foreign References:
| JP2013026195A | 2013-02-04 | |||
| JP2015088339A | 2015-05-07 | |||
| JP2012243389A | 2012-12-10 |
Attorney, Agent or Firm:
AI ASSOCIATION OF PATENT AND TRADEMARK ATTORNEYS (JP)
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