Title:
MEMS SWITCH
Document Type and Number:
WIPO Patent Application WO/2011/065192
Kind Code:
A1
Abstract:
Disclosed is an MEMS switch capable of adjusting characteristic impedance to offset characteristic impedance disruption that may arise when in use. An MEMS switch (SD10) comprises a first tunable capacitor (CA11) disposed corresponding to a first signal line (SL11), a second tunable capacitor (CA12) disposed corresponding to a second signal line (SL12), a bias voltage input terminal (Ti11b) for applying bias voltage to a dielectric layer (24) of the first tunable capacitor (CA11) via the first signal line (SL11) and one electrode layer (25) of the first tunable capacitor (CA11), and a bias voltage input terminal (Ti12b) for applying bias voltage to a dielectric layer (27) of the second tunable capacitor (CA12) via the second signal line (SL12) and one electrode layer (28) of the second tunable capacitor (CA12).
Inventors:
NAKAMURA KENTARO (JP)
FUJII TOMONORI (JP)
FUJII TOMONORI (JP)
Application Number:
PCT/JP2010/069460
Publication Date:
June 03, 2011
Filing Date:
November 02, 2010
Export Citation:
Assignee:
TAIYO YUDEN KK (JP)
NAKAMURA KENTARO (JP)
FUJII TOMONORI (JP)
NAKAMURA KENTARO (JP)
FUJII TOMONORI (JP)
International Classes:
H01H57/00; B81B3/00; H01G7/06
Foreign References:
| JP2007513782A | 2007-05-31 | |||
| JP2008181725A | 2008-08-07 | |||
| JP2008277743A | 2008-11-13 |
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