METHOD AND APPARATUS FOR PRODUCING EXTREME ULTRAVIOLETT RADIATION OR SOFT X-RAY RADIATION

Title:

METHOD AND APPARATUS FOR PRODUCING EXTREME ULTRAVIOLETT RADIATION OR SOFT X-RAY RADIATION

Document Type and Number:

WIPO Patent Application WO2005025280

Kind Code:

A3

Abstract:

A method of producing extreme ultraviolet radiation (EUV) or soft X-ray radiation by means of an electrically operated discharge, in particular for EUV lithography or for metrology, in which a plasma (22) is ignited in a gaseous medium between at least two electrodes (14, 16) in a discharge space (12), said plasma emitting said radiation that is to be produced.The gaseous medium is produced from a metal melt (24), which is applied to a surface in said discharge space (12) and at least partially evaporated by an energy beam, in particular by a laser beam (20).

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Inventors:

JONKERS JEROEN (DE)
VAUDREVANGE DOMINIK MARCEL (DE)
NEFF WILLI (DE)

Application Number:

PCT/IB2004/051651

Publication Date:

June 16, 2005

Filing Date:

September 01, 2004

Export Citation:

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Assignee:

KONINKL PHILIPS ELECTRONICS NV (NL)
FRAUNHOFER GES FORSCHUNG (DE)
JONKERS JEROEN (DE)
VAUDREVANGE DOMINIK MARCEL (DE)
NEFF WILLI (DE)

International Classes:

H05G2/00; (IPC1-7): H05G2/00

Domestic Patent References:

WO2001095362A1

2001-12-13

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