Title:
METHOD FOR CONTINUOUSLY PRODUCING SILICON NITRIDE SINTERED COMPACT
Document Type and Number:
WIPO Patent Application WO/2022/004754
Kind Code:
A1
Abstract:
Provided is a method for continuously producing a silicon nitride sintered compact, whereby it is possible to produce a silicon nitride sintered compact continuously by the sintering using a silicon nitride powder having a high β transformation ratio. A firing jig 2, in which a material to be fired 1 that comprises a silicon nitride powder having a β transformation ratio of 80% or more and a specific surface area of 7 to 20 m2/g and a sintering additive and has a total aluminum element content adjusted to 800 ppm or less is accommodated, is fed to a continuous firing furnace, and is then heated to a temperature of 1200 to 1800°C under an inert gas atmosphere and under a pressure of 0 MPa•G or more and less than 0.1 MPa•G to sinter silicon nitride, in which the continuous firing furnace is equipped with an airtight-type firing container 5 having an opening/closing door 3 for feeding the firing jig and an opening/closing door 4 for discharging the firing jig at both ends thereof, a heating mechanism 6 arranged on the outer periphery of a body part of the firing container 5, a conveyance mechanism for feeding/discharging the firing jig into/from the firing container, and a gas feeding mechanism for feeding an inert gas into the firing container.
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Inventors:
KUSANO DAI (JP)
Application Number:
PCT/JP2021/024642
Publication Date:
January 06, 2022
Filing Date:
June 29, 2021
Export Citation:
Assignee:
TOKUYAMA CORP (JP)
International Classes:
F27B9/04; C04B35/587; C04B35/64; F27B9/26; H01L23/12
Domestic Patent References:
| WO2019167879A1 | 2019-09-06 | |||
| WO2013105577A1 | 2013-07-18 | |||
| WO2019167879A1 | 2019-09-06 |
Foreign References:
| JP2008175517A | 2008-07-31 | |||
| JPH01252886A | 1989-10-09 | |||
| JP2002128569A | 2002-05-09 | |||
| JP2000264608A | 2000-09-26 |
Other References:
JOURNAL OF THE MARINE ENGINEERING SOCIETY IN JAPAN, vol. 28, September 1993 (1993-09-01), pages 548 - 556
JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, vol. 100, no. 11, 1992, pages 1366 - 1370
C.P. GAZZARAD.R. MESSIER, AM. CERAM. SOC. BULL., vol. 56, 1977, pages 777 - 780
JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, vol. 100, no. 11, 1992, pages 1366 - 1370
C.P. GAZZARAD.R. MESSIER, AM. CERAM. SOC. BULL., vol. 56, 1977, pages 777 - 780
Attorney, Agent or Firm:
ONO, Hisazumi et al. (JP)
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