Title:
METHOD FOR DETECTING MICROTOPOGRAPHY AND ROUGHNESS OF INNER WALL OF GAP
Document Type and Number:
WIPO Patent Application WO/2020/000249
Kind Code:
A1
Abstract:
A method for detecting the microtopography and roughness of an inner wall of a gap, comprising: 1) shrinking and inserting a flexible mechanism having a stick-on measurement thin film into a gap; 2) controlling the flexible mechanism to inflate by means of a controller, so that the measurement thin film is effectively attached to a surface to be measured, and the measuring thin film extracting microtopography and surface roughness information of an inner wall by means of copying; and 3) controlling the flexible mechanism to shrink and exit from an inlet of the gap, and performing numerical value measurement on the microtopography and surface roughness of the inner wall that are extracted by the measurement thin film by means of a surface topography measuring instrument.
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Inventors:
GUO JIANG (CN)
LIU SHUJIE (CN)
KANG RENKE (CN)
GUO DONGMING (CN)
LIU SHUJIE (CN)
KANG RENKE (CN)
GUO DONGMING (CN)
Application Number:
PCT/CN2018/093078
Publication Date:
January 02, 2020
Filing Date:
June 27, 2018
Export Citation:
Assignee:
UNIV DALIAN TECH (CN)
International Classes:
G01B21/30; G01B13/22
Foreign References:
| CN207074048U | 2018-03-06 | |||
| CN103615992A | 2014-03-05 | |||
| CN107416763A | 2017-12-01 | |||
| JP2003226546A | 2003-08-12 |
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