METHOD AND DEVICE FOR CHECKING MEMS ACCELERATION SENSOR CHIP

WIPO Patent Application WO/2022/068218

A1

A method and apparatus for checking a MEMS acceleration sensor chip, the method comprising: applying a variable direct current voltage and an alternating current voltage of a preset frequency to a first electrode plate and a second electrode plate of a MEMS acceleration sensor chip to obtain a base capacitance value and a voltage-applied capacitance value between the first electrode plate and the second electrode plate (101, 102); on the basis of the obtained base capacitance value and the voltage-applied capacitance value, determining a breakover voltage, a capacitance change value, and a C-V characteristic curve (103); and on the basis of the base capacitance value, the breakover voltage, the capacitance change value, and the C-V characteristic curve of the first electrode plate and the second electrode plate, determining whether the MEMS acceleration sensor chip is normal (104). The invention is used to solve the existing technical problem that when a MEMS acceleration sensor chip has finished being processed, it cannot be preliminarily determined whether the MEMS acceleration sensor chip is normal, thus achieving checking of MEMS acceleration sensor chips after completion of processing, greatly saving costs.

LIU JING (CN)
FENG FANGFANG (CN)
LI ZONGWEI (CN)
YANG CHANGCHUN (CN)
ZHOU YONGJIAN (CN)

PCT/CN2021/094562

April 07, 2022

May 19, 2021

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INST GEOLOGY & GEOPHYSICS CAS (CN)

G01R31/28; G01P15/08

CN104977473A	2015-10-14
CN109341744A	2019-02-15
CN105259372A	2016-01-20
CN103837706A	2014-06-04
US20060219536A1	2006-10-05

BEIJING JUNHUI INTELLECTUAL PROPERTY AGENT OFFICE (ORDINARY PARTNERSHIP) (CN)

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