Title:
METHOD AND SYSTEM FOR BATCH TESTING OF MEMS ACCELERATION SENSOR CHIPS
Document Type and Number:
WIPO Patent Application WO/2022/068217
Kind Code:
A1
Abstract:
A method and a system for batch testing of MEMS acceleration sensor chips, for solving the problems of large amounts of labor consumption and large testing workloads during MEMS acceleration sensor chip testing. The system comprises a test fixture (1) for placing a plurality of MEMS acceleration sensor chips to be tested; a channel switching device (2), which is connected to the MEMS acceleration sensor chips to be tested, switches the connection of each of a plurality of channels on the basis of a first clock signal, thus automatically switching testing of the plurality of chips, and on the basis of a second clock signal, respectively connects first electrode plates or third electrode plates of the MEMS acceleration sensor chips to be tested to a capacitance testing device (3); the capacitance testing device (3), which measures the capacitance values between the first electrode plates and the second electrode plates of the MEMS acceleration sensor chips to be tested, and the capacitance values between the second electrode plates and the third electrode plates; and a controller (4), which, on the basis of the measured capacitance values, determines voltage and capacitance characteristic curves corresponding to the chips, and controls the channel switching device (2) to perform corresponding channel switching.
Inventors:
LIU JING (CN)
FENG FANGFANG (CN)
LI ZONGWEI (CN)
YANG CHANGCHUN (CN)
ZHOU YONGJIAN (CN)
FENG FANGFANG (CN)
LI ZONGWEI (CN)
YANG CHANGCHUN (CN)
ZHOU YONGJIAN (CN)
Application Number:
PCT/CN2021/094561
Publication Date:
April 07, 2022
Filing Date:
May 19, 2021
Export Citation:
Assignee:
INST GEOLOGY & GEOPHYSICS CAS (CN)
International Classes:
G01P21/00; G01P15/125
Foreign References:
| CN105259372A | 2016-01-20 | |||
| US5492020A | 1996-02-20 | |||
| CN111337709A | 2020-06-26 | |||
| CN111103440A | 2020-05-05 | |||
| CN211785616U | 2020-10-27 |
Attorney, Agent or Firm:
BEIJING JUNHUI INTELLECTUAL PROPERTY AGENT OFFICE (ORDINARY PARTNERSHIP) (CN)
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