Title:
METHOD AND DEVICE FOR MANUFACTURING MICRODEVICE
Document Type and Number:
WIPO Patent Application WO/2022/178903
Kind Code:
A1
Abstract:
The present invention relates to a method for manufacturing a microdevice, comprising: providing more than two micro-objects; moving the first micro-object with one or more charged particle beams and making the first micro-object in contact with the second micro-object; and connecting the first micro-object to the second micro-object. The present invention extends the manufacture of microdevices to nano-scale.
Inventors:
TIAN HE (CN)
SUN TULAI (CN)
REN TIANXING (CN)
ZHANG WANRU (CN)
CHEN XINKAI (CN)
ZHANG ZE (CN)
SUN TULAI (CN)
REN TIANXING (CN)
ZHANG WANRU (CN)
CHEN XINKAI (CN)
ZHANG ZE (CN)
Application Number:
PCT/CN2021/078356
Publication Date:
September 01, 2022
Filing Date:
February 28, 2021
Export Citation:
Assignee:
UNIV ZHEJIANG (CN)
International Classes:
H01H36/00; G02B21/32
Domestic Patent References:
| WO2012060056A1 | 2012-05-10 |
Foreign References:
| CN102136393A | 2011-07-27 | |||
| CN1977159A | 2007-06-06 | |||
| CN1830752A | 2006-09-13 | |||
| JP2010133710A | 2010-06-17 |
Other References:
"Experts Discover That Electron Beams Can Move Micro-Objects=", ZHONGGUO JIAO GONG, no. 2, 29 February 2012 (2012-02-29), XP009539298, ISSN: 1004-1362
Attorney, Agent or Firm:
BEIJING WEIHE IP AGENCY COMPANY LIMITED (CN)
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