METHOD FOR EVACUATING VACUUM CHAMBER, VACUUM DEVICE, METHOD FOR FORMING ORGANIC FILM, METHOD FOR MANUFACTURING ORGANIC EL ELEMENT, ORGANIC EL DISPLAY PANEL, ORGANIC EL DISPLAY DEVICE, ORGANIC EL LIGHT EMITTING DEVICE, AND METHOD FOR DETECTING IMPURITIES

WIPO Patent Application WO/2013/145640

A1

Provided is a method for evacuating a vacuum chamber that reduces to the extent possible impurity contamination within the vacuum chamber. The method includes a roughing step that evacuates a vacuum chamber (1) using a roughing pump (2), which is a mechanical pump that can evacuate the vacuum chamber (1) to an internal pressure of less than 15 [Pa] and a main exhausting step that evacuates the vacuum chamber (1) after the roughing step using a main exhausting pump (3), which is a non-mechanical pump. Transition to the main exhausting step from the roughing step is carried out when the internal pressure of the vacuum chamber (1) is 15 [Pa] or more.

WO/2024/008729	INJECTION DEVICE FOR A SALT SEPARATOR, OF THE TYPE HAVING A SURFACE SCRAPED BY AT LEAST ONE ROTOR ROTATING IN A HEATED CONTAINMENT, ASSOCIATED SALT SEPARATOR AND ASSOCIATED BIOMASS GASIFICATION INSTALLATION
JP4393856	Film deposition equipment
WO/2008/032327	ORGANIC NANOPARTICLES OBTAINED FROM MICROEMULSIONS BY SOLVENT EVAPORATION

KAWANAMI YUKO
YAMADA RYUUTA

PCT/JP2013/001873

October 03, 2013

March 19, 2013

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PANASONIC CORP (JP)

B01J3/02; C23C14/12; F04B37/16; H01L51/50; H05B33/10

JP2011044299A	2011-03-03
JP2000192883A	2000-07-11
JPH09250454A	1997-09-22
JPH0693427A	1994-04-05
JPH08138615A	1996-05-31
JP2011256129A	2011-12-22
JP2009008474A	2009-01-15
JPH054034A	1993-01-14

NAKAJIMA, Shiro et al. (JP)
Shiro Nakajima (JP)

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