Title:
METHOD FOR FORMING BULK ACOUSTIC WAVE RESONANCE APPARATUS
Document Type and Number:
WIPO Patent Application WO/2024/067087
Kind Code:
A1
Abstract:
A method for forming a bulk acoustic wave resonance apparatus. The method comprises: forming a first portion, which comprises: providing a first substrate; forming a piezoelectric layer, which is located above the first substrate; forming a first electrode layer, which is located on the piezoelectric layer; and forming a cavity pre-treatment layer, which is located on the piezoelectric layer. The step of forming a cavity pre-treatment layer comprises: forming a sacrificial layer, which is located above the piezoelectric layer, the sacrificial layer being made of metal material. The method further comprises: forming a second portion, which comprises providing a second substrate; joining the first portion to the second portion; removing the first substrate; forming a second electrode layer; and removing the sacrificial layer to form a cavity. A bulk acoustic wave resonance apparatus is formed by means of a joining process, thereby avoiding a planarization treatment on a sacrificial layer, such that the material selection of the sacrificial layer is more flexible. By means of selecting the sacrificial layer made of metal material, the metal material can fully react with a release solution in the process of removing the sacrificial layer; and by means of controlling the reaction rate, the problem of the collapsing of the structure above a cavity can be avoided, and the problem of the sacrificial layer not being released completely can also be avoided, thereby enhancing the performance of the bulk acoustic wave resonance apparatus.
Inventors:
HUANG XUAN (CN)
ZOU YALI (CN)
YANG XINYU (CN)
TANG ZHENGJIE (CN)
ZOU YALI (CN)
YANG XINYU (CN)
TANG ZHENGJIE (CN)
Application Number:
PCT/CN2023/118479
Publication Date:
April 04, 2024
Filing Date:
September 13, 2023
Export Citation:
Assignee:
CHANGZHOU CHEMSEMI CO LTD (CN)
International Classes:
H03H3/02; H03H9/02
Foreign References:
| CN115632623A | 2023-01-20 | |||
| CN111786650A | 2020-10-16 | |||
| CN103929149A | 2014-07-16 | |||
| US10217930B1 | 2019-02-26 |
Attorney, Agent or Firm:
UNITALEN ATTORNEYS AT LAW CO., LTD. (CN)
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