METHOD OF MAKING A REFLECTIVE DISPLAY DEVICE USING THIN FILM TRANSISTOR PRODUCTION TECHNIQUES

Title:

METHOD OF MAKING A REFLECTIVE DISPLAY DEVICE USING THIN FILM TRANSISTOR PRODUCTION TECHNIQUES

Document Type and Number:

WIPO Patent Application WO2006036642

Kind Code:

A3

Abstract:

MEMS devices (such as interferometric modulators) may be fabricated using thin film transistor (TFT) manufacturing techniques. In an embodiment, a MEMS manufacturing process includes identifying a TFT production line and arranging for the manufacture of MEMS devices on the TFT production line. In another embodiment, an interferometric modulator is at least partially fabricated on a production line previously configured for TFT production.

Inventors:

CHUI CLARENCE (US)

Application Number:

PCT/US2005/033558

Publication Date:

July 06, 2006

Filing Date:

September 19, 2005

Export Citation:

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Assignee:

IDC LLC (US)
CHUI CLARENCE (US)

International Classes:

B81B3/00; B81B7/02; G02B26/00; G02B26/08

Foreign References:

US20020015215A1	2002-02-07
US6407851B1	2002-06-18
EP1452481A2	2004-09-01

Other References:

PATENT ABSTRACTS OF JAPAN vol. 2002, no. 06 4 June 2002 (2002-06-04)

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