Title:
METHOD FOR MANUFACTURING FLEXIBLE MICRO-SUPERCAPACITOR, AND FLEXIBLE MICRO-SUPERCAPACITOR HAVING POLYMER BUFFER LAYER MANUFACTURED THEREBY
Document Type and Number:
WIPO Patent Application WO/2024/063216
Kind Code:
A1
Abstract:
One embodiment of the present invention provides a method for manufacturing a large-area flexible micro-supercapacitor with precise patterning technology, high yield, and high reproducibility, and a flexible micro-supercapacitor having a polymer buffer layer manufactured thereby. The method for manufacturing a flexible micro-supercapacitor according to an embodiment of the present invention comprises: a mask deposition step of depositing a photoresist mask on the top of a substrate coated with a polyimide (PI) film; a surface treatment step of treating the surface of the mask-deposited substrate with an active gas plasma; a MXene coating step of coating the top of the surface-treated substrate with MXene; a photoresist removal step of removing photoresist from the MXene-coated substrate by means of a lift-off process to form a MXene pattern; a buffer layer coating step of coating the top of the MXene patterned-formed substrate with a buffer layer; and a peeling step of peeling the polyimide film from the substrate.
Inventors:
LEE YONG HEE (KR)
AHN CHI WON (KR)
KIM EUN JI (KR)
OH YEON WHA (KR)
JEONG SANG HUI (KR)
KANG IL SUK (KR)
LEE GYU HAN (KR)
AHN CHI WON (KR)
KIM EUN JI (KR)
OH YEON WHA (KR)
JEONG SANG HUI (KR)
KANG IL SUK (KR)
LEE GYU HAN (KR)
Application Number:
PCT/KR2022/020262
Publication Date:
March 28, 2024
Filing Date:
December 13, 2022
Export Citation:
Assignee:
KOREA ADVANCED INST SCI & TECH (KR)
International Classes:
H01G11/84; H01G11/56
Foreign References:
| JP2011017042A | 2011-01-27 | |||
| KR102129314B1 | 2020-07-02 | |||
| KR20220073431A | 2022-06-03 |
Other References:
JIANG QIU, KURRA NARENDRA, MALESKI KATHLEEN, LEI YONGJIU, LIANG HANFENG, ZHANG YIZHOU, GOGOTSI YURY, ALSHAREEF HUSAM N.: "On‐Chip MXene Microsupercapacitors for AC‐Line Filtering Applications", ADVANCED ENERGY MATERIALS, WILEY - V C H VERLAG GMBH & CO. KGAA, DE, DE , pages 1901061, XP055977113, ISSN: 1614-6832, DOI: 10.1002/aenm.201901061
KIM EUNJI; SONG JINKYU; SONG TAE-EUN; KIM HYERI; KIM YONG-JAE; OH YEON-WHA; JUNG SANGHEE; KANG IL-SEOK; GOGOTSI YURY; HAN HEE; AHN: "Scalable fabrication of MXene-based flexible micro-supercapacitor with outstanding volumetric capacitance", CHEMICAL ENGENEERING JOURNAL, ELSEVIER, AMSTERDAM, NL, vol. 450, 3 August 2022 (2022-08-03), AMSTERDAM, NL , XP087181596, ISSN: 1385-8947, DOI: 10.1016/j.cej.2022.138456
KIM EUNJI; SONG JINKYU; SONG TAE-EUN; KIM HYERI; KIM YONG-JAE; OH YEON-WHA; JUNG SANGHEE; KANG IL-SEOK; GOGOTSI YURY; HAN HEE; AHN: "Scalable fabrication of MXene-based flexible micro-supercapacitor with outstanding volumetric capacitance", CHEMICAL ENGENEERING JOURNAL, ELSEVIER, AMSTERDAM, NL, vol. 450, 3 August 2022 (2022-08-03), AMSTERDAM, NL , XP087181596, ISSN: 1385-8947, DOI: 10.1016/j.cej.2022.138456
Attorney, Agent or Firm:
HAN, Sang Soo (KR)
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