Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
METHOD FOR MANUFACTURING MIRROR DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/137674
Kind Code:
A1
Abstract:
Provided is a method for manufacturing a mirror device comprising a structure having a support part, a movable part, and a coupling part, and a mirror layer provided on the movable part. This method for manufacturing the mirror device comprises: a first forming step for forming a plurality of portions each corresponding to the structure on a wafer; a second forming step for forming the mirror layer on a section corresponding to the movable part in each of the plurality of portions; a heating step for, after the first forming step and the second forming step, heating the section corresponding to the movable part in each of the plurality of portions; and a cutting step for, after the heating step, cutting the wafer such that the plurality of portions are separated from each other.

More Like This:
WO/2022/089513LIGHT REFLECTION ASSEMBLY, OPTICAL SWITCH, AND PHOTOGRAPHY DEVICE
WO/2018/057982STOP STRUCTURE FOR OPTICAL MODULE
WO/2019/029552ELECTROMAGNETIC ACTIVATED MIRROR ARRAY WITH FLUID DAMPING AND MICRO-FABRICATED RECESS FOR MAGNET ASSEMBLY
Inventors:
IDE TOMOYUKI (JP)
SUZUKI DAIKI (JP)
TAKAHASHI MIKITO (JP)
Application Number:
PCT/JP2021/033949
Publication Date:
June 30, 2022
Filing Date:
September 15, 2021
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
HAMAMATSU PHOTONICS KK (JP)
International Classes:
G02B26/08; B81C1/00; G02B26/10
Foreign References:
JP2010044410A2010-02-25
JP2018010038A2018-01-18
JP2011180249A2011-09-15
CN110927960A2020-03-27
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Download PDF:
View/Download PDF      PDF Help



 
Previous Patent: GLASS STRUCTURE AND MANUFACTURING METHOD THEREFOR

Next Patent: METHOD FOR PRODUCING SPROUTED GRAIN, METHOD FOR PRODUCING SPROUTED GRAIN FOOD, AND SPROUTED GRAIN CO...