Title:
METHOD FOR MANUFACTURING OPTICAL WAVEGUIDE DEVICE AND OPTICAL WAVEGUIDE DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/275990
Kind Code:
A1
Abstract:
There is a problem that, in order to ensure a light input/output function of a silicon photonics optical waveguide substrate, enormous time and cost are required for an optical polishing step, an active alignment step, and the like of each member. In the present invention, a V-groove (103) is formed on an Si substrate (101) of a silicon photonics optical waveguide according to the position of the optical waveguide by a photolithography technology and an etching step. The depth of the V-groove (103) is adjusted such that the center of a core of an optical fiber (102a) matches the height of the optical waveguide. An end surface of the optical fiber (102a) is a diced surface. Low-loss optical connection is established by disposing the optical fiber (102a) in the V-groove (103).
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Inventors:
YAMADA TAKASHI (JP)
IKUMA YUICHIRO (JP)
IKUMA YUICHIRO (JP)
Application Number:
PCT/JP2021/024551
Publication Date:
January 05, 2023
Filing Date:
June 29, 2021
Export Citation:
Assignee:
NIPPON TELEGRAPH & TELEPHONE (JP)
International Classes:
G02B6/122; G02B6/13; G02B6/30
Foreign References:
| US9423561B1 | 2016-08-23 | |||
| JPH07281060A | 1995-10-27 | |||
| US20030021545A1 | 2003-01-30 | |||
| JP2005352453A | 2005-12-22 | |||
| JPH10246838A | 1998-09-14 | |||
| JP2015072330A | 2015-04-16 |
Attorney, Agent or Firm:
TANI & ABE, P.C. (JP)
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