METHOD FOR MANUFACTURING SOLAR CELL

WIPO Patent Application WO/2020/105265

A1

The present invention provides a solar cell manufacturing method with which solar cells having high performance can be manufactured more efficiently compared to conventional art. The invention comprises: a first semiconductor layer formation step for forming a first semiconductor layer on a first principal surface side of a semiconductor substrate; a lift-off layer lamination step for laminating a lift-off layer on the first semiconductor layer; a patterning step for selectively removing each of the first semiconductor layer and the lift-off layer; a second semiconductor layer formation step for forming a second semiconductor layer on the first principal surface side in a manner extending from a section where the first semiconductor layer and the lift-off layer have been removed and spanning a section where the first semiconductor layer and the lift-off layer are laminated; and a lift-off step for removing the second semiconductor layer covering the lift-off layer by removing the lift-off layer. In the patterning step, the first semiconductor layer and the lift-off layer are removed by using a plurality of types of etching solutions so that the etching area of the first semiconductor layer becomes equal to or less than the etching area of the lift-off layer. The lift-off layer includes a metal as a main component.

KUCHIYAMA TAKASHI (JP)

PCT/JP2019/036765

May 28, 2020

September 19, 2019

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KANEKA CORP (JP)

H01L31/0747; H01L21/308; H01L31/18

JP2014158017A	2014-08-28
JP2013120863A	2013-06-17
JP2000100778A	2000-04-07
JP2005277329A	2005-10-06
JPS6265428A	1987-03-24
US20140096819A1	2014-04-10

FUJITA Takashi et al. (JP)

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