Title:
METHOD FOR MANUFACTURING STACKED THIN FILM, METHOD FOR MANUFACTURING SOLAR CELL, MULTI-JUNCTION SOLAR CELL, SOLAR CELL MODULE, AND PHOTOVOLTAIC POWER GENERATION SYSTEM
Document Type and Number:
WIPO Patent Application WO/2022/201591
Kind Code:
A1
Abstract:
A method for manufacturing a stacked thin film of an embodiment includes forming a p-electrode on a substrate, forming a film that mainly contains a cuprous oxide and/or a complex oxide of cuprous oxides on the p-electrode, and performing an oxidation treatment on the film that mainly contains the cuprous oxide and/or the complex oxide of cuprous oxides. An ozone partial pressure in the oxidation treatment is 5 [Pa] or more and 200 [Pa] or less, a treatment temperature in the oxidation treatment is 273 [K] or more and 323 [K] or less, and a treatment time in the oxidation treatment is 1 second or more and 60 minutes or less.
Inventors:
HONISHI YUYA (JP)
SHIBASAKI SOICHIRO (JP)
NAKAGAWA NAOYUKI (JP)
MIZUNO YUKITAMI (JP)
YAMAZAKI MUTSUKI (JP)
NISHIDA YASUTAKA (JP)
YAMAMOTO KAZUSHIGE (JP)
ASAKURA TARO (JP)
SHIBASAKI SOICHIRO (JP)
NAKAGAWA NAOYUKI (JP)
MIZUNO YUKITAMI (JP)
YAMAZAKI MUTSUKI (JP)
NISHIDA YASUTAKA (JP)
YAMAMOTO KAZUSHIGE (JP)
ASAKURA TARO (JP)
Application Number:
PCT/JP2021/033995
Publication Date:
September 29, 2022
Filing Date:
September 15, 2021
Export Citation:
Assignee:
TOSHIBA KK (JP)
TOSHIBA ENERGY SYSTEMS & SOLUTIONS CORP (JP)
TOSHIBA ENERGY SYSTEMS & SOLUTIONS CORP (JP)
International Classes:
H01L31/032; H01L31/0336; H01L31/0725
Foreign References:
| US20200006589A1 | 2020-01-02 | |||
| US20200006583A1 | 2020-01-02 | |||
| CN110112225A | 2019-08-09 | |||
| JP2018024895A | 2018-02-15 | |||
| CN105161625A | 2015-12-16 | |||
| JP2014170865A | 2014-09-18 | |||
| JP6790296B1 | 2020-11-25 |
Other References:
SHIBASAKI SOICHIRO ET AL: "Transparent Cu2O solar cell for high-efficiency and low-cost tandem photovoltaics", 2019 IEEE 46TH PHOTOVOLTAIC SPECIALISTS CONFERENCE (PVSC), IEEE, 16 June 2019 (2019-06-16), pages 1061 - 1063, XP033702950, DOI: 10.1109/PVSC40753.2019.8980509
NISHI Y ET AL: "High-efficiency Cu 2 O-based heterojunction solar cells fabricated on thermally oxidized copper sheets", PHOTOVOLTAIC SPECIALISTS CONFERENCE (PVSC), 2011 37TH IEEE, IEEE, 19 June 2011 (2011-06-19), pages 266 - 270, XP032167640, ISBN: 978-1-4244-9966-3, DOI: 10.1109/PVSC.2011.6185896
NISHI Y ET AL: "High-efficiency Cu 2 O-based heterojunction solar cells fabricated on thermally oxidized copper sheets", PHOTOVOLTAIC SPECIALISTS CONFERENCE (PVSC), 2011 37TH IEEE, IEEE, 19 June 2011 (2011-06-19), pages 266 - 270, XP032167640, ISBN: 978-1-4244-9966-3, DOI: 10.1109/PVSC.2011.6185896
Attorney, Agent or Firm:
IKEGAMI, Tetsuma et al. (JP)
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