Title:
METHOD FOR MANUFACTURING THIN FILM ACTUATOR
Document Type and Number:
WIPO Patent Application WO/2012/096348
Kind Code:
A1
Abstract:
The objective of the present invention is to provide a method for manufacturing a thin film actuator which changes greatly in form and can be easily controlled in the amount or the direction of deformation, while being suppressed in performance deterioration due to use. The objective is achieved by a method for manufacturing a thin film actuator, wherein a laminated thin film (23), which is obtained by laminating a resin thin film (21) and a shape-memory alloy thin film (22), is heated and maintained, while having the shape thereof being restrained by being affixed to a member for molding, so that a predetermined creep deformation is confined only to the resin thin film.
Inventors:
ISHIDA AKIRA (JP)
Application Number:
PCT/JP2012/050498
Publication Date:
July 19, 2012
Filing Date:
January 12, 2012
Export Citation:
Assignee:
NAT INST FOR MATERIALS SCIENCE (JP)
ISHIDA AKIRA (JP)
ISHIDA AKIRA (JP)
International Classes:
F03G7/06
Domestic Patent References:
| WO2008142980A1 | 2008-11-27 |
Foreign References:
| JP2000334883A | 2000-12-05 | |||
| JPH0333396U | 1991-04-02 | |||
| JP2002039053A | 2002-02-06 | |||
| JPS591249A | 1984-01-06 | |||
| JPH10502741A | 1998-03-10 | |||
| JPH0988804A | 1997-03-31 |
Other References:
See also references of EP 2664792A4
Attorney, Agent or Firm:
NISHIZAWA TOSHIO (JP)
Toshio Nishizawa (JP)
Toshio Nishizawa (JP)
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Claims: