Title:
METHOD FOR MONITORING NEUTRON BEAM AND ION INJECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/181700
Kind Code:
A1
Abstract:
A method of the present disclosure comprises: recording, in a recording device, time-series data in which beam conditions including an ion species, energy, and beam current of an ion beam that is transported along a beam line in an ion injection device are associated with a neutron dose rate that is measured at a predetermined measurement position in the ion injection device; transporting a high energy ion beam along the beam line; acquiring a measurement value of the neutron dose rate measured at the predetermined measurement position during transport of the high energy ion beam; using the time-series data and the beam conditions of the high energy ion beam to compute an estimate value of the neutron dose rate estimated at the predetermined measurement position during the transport of the high energy ion beam; and comparing the measurement value and the estimate value.
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Inventors:
NAKAJIMA TSUYOSHI (JP)
ISHIKAWA MASAKI (JP)
MATSUSHITA HIROSHI (JP)
ISHIKAWA MASAKI (JP)
MATSUSHITA HIROSHI (JP)
Application Number:
PCT/JP2023/004752
Publication Date:
September 28, 2023
Filing Date:
February 13, 2023
Export Citation:
Assignee:
SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD (JP)
International Classes:
H01L21/265; G01N23/09; G01T3/00; H01J37/244; H01J37/317; H05H9/00
Foreign References:
| JP2020153748A | 2020-09-24 |
Attorney, Agent or Firm:
MORISHITA Sakaki (JP)
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