METHOD FOR PRODUCING CONCENTRATED SOLUTION FOR PHOTORESIST STRIPPER HAVING LOW WATER CONTENT

Title:

METHOD FOR PRODUCING CONCENTRATED SOLUTION FOR PHOTORESIST STRIPPER HAVING LOW WATER CONTENT

Document Type and Number:

WIPO Patent Application WO/2010/073430

Kind Code:

A1

Abstract:

Disclosed is a method for producing a concentrated solution of quaternary ammonium hydroxide. The method is characterized by comprising: mixing quaternary ammonium hydroxide in the form of a water-containing crystal or an aqueous solution with a water-soluble organic solvent selected from the group consisting of a glycol ether, a glycol and a triol to prepare a mixed solution; and subjecting the mixed solution to thin-film distillation under reduced pressure to distil a distillate away. By employing the method, it becomes possible to produce a concentrated quaternary ammonium hydroxide solution having a low water content conveniently.

More Like This:

WO/2018/099871	METHOD FOR STABILIZING AT LEAST MONO-ALKYL-SUBSTITUTED DIAMINOCYCLOHEXANES
JP4039453	Air conditioner

Inventors:

HIROSE KATSUTOSHI (JP)
KOYAMA HIROYA (JP)
KAMASAKA KIMIHIRO (JP)
SASABE TARO (JP)
KAI NAOSHI (JP)

Application Number:

PCT/JP2009/004169

Publication Date:

July 01, 2010

Filing Date:

August 27, 2009

Export Citation:

Click for automatic bibliography generation Help

Assignee:

KNC LAB CO LTD (JP)
VISION LINK CORP (JP)
HIROSE KATSUTOSHI (JP)
KOYAMA HIROYA (JP)
KAMASAKA KIMIHIRO (JP)
SASABE TARO (JP)
KAI NAOSHI (JP)

International Classes:

C07C209/90; C07C211/63

Domestic Patent References:

WO2007053363A2	2007-05-10
WO2007053363A2	2007-05-10
WO2008051627A1	2008-05-02

Foreign References:

JPH01158444A	1989-06-21
JPH04338366A	1992-11-25
JPS59134752A	1984-08-02

Other References: