Title:
METHOD FOR PRODUCING GLASS SHEET
Document Type and Number:
WIPO Patent Application WO/2023/157625
Kind Code:
A1
Abstract:
A method for producing a glass sheet which comprises: modifying predetermined portions where through-holes are to be formed, by irradiation with laser light; and a through-hole formation step S2 in which through-holes are then formed in the predetermined portions. The through-hole formation step S2 comprises an etching step S2a in which the glass sheet is etched with an etchant and a deposit removal step S2b in which the glass sheet is taken out of the etchant and a deposit precipitated out on the predetermined portions in the etching step S2a is removed. Due to this, the through-holes of the glass substrate can have improved evenness in hole diameter.
Inventors:
TANAKA HIROAKI (JP)
Application Number:
PCT/JP2023/002853
Publication Date:
August 24, 2023
Filing Date:
January 30, 2023
Export Citation:
Assignee:
NIPPON ELECTRIC GLASS CO (JP)
International Classes:
C03C15/00; B23K26/53; C03C23/00; H01L21/306
Foreign References:
| CN113045209A | 2021-06-29 | |||
| JP2011178642A | 2011-09-15 | |||
| JP2019038723A | 2019-03-14 |
Attorney, Agent or Firm:
SHIROMURA Kunihiko et al. (JP)
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