Title:
METHOD FOR PRODUCING MULTI-METAL FINE PARTICLES AND METHOD FOR PRODUCING MULTI-METAL FINE PARTICLE THIN FILM
Document Type and Number:
WIPO Patent Application WO/2020/165959
Kind Code:
A1
Abstract:
A method for producing multi-metal fine particles in which two or more kinds of metal elements are mixed comprises: installing a target group including a first target made of a first metal or alloy and a second target made of a second metal or alloy, the second target being arranged inside a chamber with respect to the first target; making gas particles to collide with the target group in the chamber to separate two or more kinds of metal atoms, metal fine particles, and/or alloy fine particles from the target group; and synthesizing multi-metal fine particles from the separated two or more kinds of metal atoms, metal fine particles, and/or alloy fine particles in the chamber. The second target is provided with a plurality of openings through which the gas particles and the metal atoms, the metal fine particles, and/or the alloy fine particles pass. The target group may further include a third target made of a third metal or alloy arranged inside the chamber with respect to the second target, and the third target is provided with a plurality of openings through which the gas particles and the metal atoms, the metal fine particles, and/or the alloy fine particles pass.
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Inventors:
SAITO KIMIAKI (JP)
SAITO MOTOAKI (JP)
SAITO MOTOAKI (JP)
Application Number:
PCT/JP2019/004921
Publication Date:
August 20, 2020
Filing Date:
February 12, 2019
Export Citation:
Assignee:
SAITO KIMIAKI (JP)
International Classes:
C23C14/14; B22F9/14
Foreign References:
| JP2003013213A | 2003-01-15 | |||
| JPS55141721A | 1980-11-05 | |||
| JPS4713414U | 1972-10-17 |
Attorney, Agent or Firm:
KURODA, Kenji et al. (JP)
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