Title:
METHOD FOR PRODUCING ORIGINAL PLATE, METHOD FOR PRODUCING MICRONEEDLE PATCH, MICRONEEDLE PATCH, AND EXPOSURE APPARATUS
Document Type and Number:
WIPO Patent Application WO/2008/020631
Kind Code:
A1
Abstract:
Disclosed is a method for producing an original plate, which comprises a step
for forming a photoresist film on a substrate, a step for arranging a photomask
having a plurality of light-shielding island portions on the photoresist film
and integrating them together, a step for selectively exposing the photoresist
film by irradiating it with light from a light source through the photomask, and
a step for forming an original plate by developing the photoresist film. This
method for producing an original plate is characterized by comprising a process
wherein the photoresist film is selectively exposed by being irradiated with
lights from a plurality of directions respectively through the photomask.
Inventors:
TOMONO TAKAO (JP)
Application Number:
PCT/JP2007/066043
Publication Date:
February 21, 2008
Filing Date:
August 17, 2007
Export Citation:
Assignee:
TOPPAN PRINTING CO LTD (JP)
TOMONO TAKAO (JP)
TOMONO TAKAO (JP)
International Classes:
G03F7/20; A61M5/31; A61M37/00
Domestic Patent References:
| WO2005017623A2 | 2005-02-24 | |||
| WO2004062899A2 | 2004-07-29 |
Foreign References:
| JP2002008522A | 2002-01-11 | |||
| JP2001235873A | 2001-08-31 | |||
| JP2003296975A | 2003-10-17 | |||
| JP2005199392A | 2005-07-28 | |||
| JP2002117756A | 2002-04-19 | |||
| JPS57200042A | 1982-12-08 | |||
| JP2006195168A | 2006-07-27 | |||
| JP2005246595A | 2005-09-15 | |||
| JP2001356187A | 2001-12-26 |
Other References:
See also references of EP 2060950A4
DEVIN V. MCALLISTER ET AL., PNAS, vol. 100, no. 24, 25 November 2003 (2003-11-25), pages 13755 - 13760
SHYH-CHYI KUO ET AL., TAMKANG JOURNAL OF SCIENCE AND ENGINEERING, vol. 7, no. 2, 2004, pages 95 - 98
MOON, SANG-JUN ET AL., TRANSDUCERS '03, 3E95.P (THE 12TH INTERNATIONAL CONFERENCE ON SOLID STATE SENSORS, ACTUATORS AND MICROSYSTEMS, 8 June 2003 (2003-06-08)
DEVIN V. MCALLISTER ET AL., PNAS, vol. 100, no. 24, 25 November 2003 (2003-11-25), pages 13755 - 13760
SHYH-CHYI KUO ET AL., TAMKANG JOURNAL OF SCIENCE AND ENGINEERING, vol. 7, no. 2, 2004, pages 95 - 98
MOON, SANG-JUN ET AL., TRANSDUCERS '03, 3E95.P (THE 12TH INTERNATIONAL CONFERENCE ON SOLID STATE SENSORS, ACTUATORS AND MICROSYSTEMS, 8 June 2003 (2003-06-08)
Attorney, Agent or Firm:
SUZUYE, Takehiko et al. (1-12-9 Toranomo, Minato-ku Tokyo 01, JP)
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