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Title:
METHOD FOR PRODUCING PEROVSKITE THIN FILM SOLAR CELL
Document Type and Number:
WIPO Patent Application WO/2022/138429
Kind Code:
A1
Abstract:
The present invention provides a method for producing a perovskite thin film solar cell, said method being capable of reducing a decrease in the performance of a perovskite thin film caused by moisture. This method for producing a perovskite thin film solar cell comprises a step for forming a perovskite thin film on a substrate 10. In the perovskite thin film formation step, a PbX2 material and an MAX material (meanwhile, X represents a halogen atom) are sequentially gasified, and the PbX2 material gas and the MAX material gas are sequentially introduced into a vacuum chamber 110 through a shower head 130 so as to sequentially form a PbX2 material film and an MAX material film on the substrate 10 by means of a vapor deposition method, thereby forming an MAPbX3 thin film. With respect to the film formation conditions for the MAX material film, the gasification temperature of the MAX material is from 230 degrees to 280 degrees; the pressure within the vacuum chamber 110 is from 150 Pa to 1,000 Pa; and the substrate 10 is cooled so that the temperature of the substrate 10 is from 100 degrees to 120 degrees.

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Inventors:
NISHIMURA HAYATO (JP)
Application Number:
PCT/JP2021/046464
Publication Date:
June 30, 2022
Filing Date:
December 16, 2021
Export Citation:
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Assignee:
KANEKA CORP (JP)
International Classes:
H01L51/44
Domestic Patent References:
WO2020246764A12020-12-10
Foreign References:
JP2018531320A2018-10-25
US20200024733A12020-01-23
US20200332408A12020-10-22
Other References:
SANDERS S., STÜMMLER D., GERBER J. D., SEIDEL J. H., SIMKUS G., HEUKEN M., VESCAN A., KALISCH H.: "Showerhead-Assisted Chemical Vapor Deposition of Perovskite Films for Solar Cell Application", MRS ADVANCES, vol. 5, no. 8-9, 1 February 2020 (2020-02-01), pages 385 - 393, XP055945670, DOI: 10.1557/adv.2020.126
Attorney, Agent or Firm:
NIIYAMA Yuichi et al. (JP)
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