Title:
METHOD FOR PRODUCING POLYMER
Document Type and Number:
WIPO Patent Application WO/2021/172296
Kind Code:
A1
Abstract:
Provided is a method for producing a polymer for a resist underlayer film-forming composition that allows the molecular weight to be controlled easily and permits conversion of substituents in the molecule and a polymerization reaction to be carried out simultaneously. A method for producing a polymer (X) in which a plurality of the same or different structural units having a methoxymethyl group and an ROCH2- group other than a methoxymethyl group (R is a monovalent organic group, a hydrogen atom, or a mixture thereof) are linked, wherein the method includes (A) a step for dissolving a compound (L) having a methoxymethyl group and optionally having a phenolic hydroxyl group in a compound (M) that reacts with the methoxymethyl group to give an ROCH2- group other than a methoxymethyl group (R is a monovalent organic group, a hydrogen atom, or a mixture thereof) to obtain a mixture and (B) a step for adding an acid catalyst to the mixture and carrying out a polymerization reaction.
Inventors:
KURAMOTO YUTARO (JP)
TOKUNAGA HIKARU (JP)
SHIMADA JUNPEI (JP)
SON GUN (JP)
TOKUNAGA HIKARU (JP)
SHIMADA JUNPEI (JP)
SON GUN (JP)
Application Number:
PCT/JP2021/006711
Publication Date:
September 02, 2021
Filing Date:
February 22, 2021
Export Citation:
Assignee:
NISSAN CHEMICAL CORP (JP)
International Classes:
C08G61/02; C08G65/40; G03F7/11; G03F7/26; H01L21/027
Domestic Patent References:
| WO2009075265A1 | 2009-06-18 |
Foreign References:
| JP2015134926A | 2015-07-27 | |||
| JP2019124943A | 2019-07-25 | |||
| JP2021015205A | 2021-02-12 |
Attorney, Agent or Firm:
TSUKUNI & ASSOCIATES et al. (JP)
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