Title:
MICRO MIRROR DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/218586
Kind Code:
A1
Abstract:
Disclosed is a micro mirror device (1) provided with an actuator (14) disposed surrounding a mirror unit (12). The actuator (14) is provided with a piezoelectric element (40), and an upper electrode (33) of the piezoelectric element (40) includes a plurality of individual electrode units (i1 – i8) which are separated into: a first stress reversal area in which the polarity of a main stress component, of which the absolute value is the maximum, is reversed among main stresses generated in an in-plane direction of a piezoelectric film (32) in a maximum displacement state when driven in a first resonance mode in which an inclination displacement is generated around a first axis in the mirror unit; and a second stress reversal area in which the polarity of a main stress component, of which the absolute value is the maximum, is reversed among main stresses generated in the in-plane direction of the piezoelectric film (32) when driven in a second resonance mode in which an inclination displacement is generated around a second axis in the mirror unit. The upper electrode (33) includes a plurality of piezoelectric units (41–48) respectively defined by the plurality of individual electrode units (i1–i8).
Inventors:
NAONO TAKAYUKI (JP)
Application Number:
PCT/JP2020/017849
Publication Date:
October 29, 2020
Filing Date:
April 24, 2020
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
B81B3/00; G02B26/10; G02B26/08
Domestic Patent References:
| WO2016052547A1 | 2016-04-07 |
Foreign References:
| US20140355088A1 | 2014-12-04 | |||
| JP2011107505A | 2011-06-02 | |||
| JPH09101474A | 1997-04-15 | |||
| JP2012237788A | 2012-12-06 | |||
| US20130194555A1 | 2013-08-01 | |||
| JP2011227216A | 2011-11-10 | |||
| JP6092713B2 | 2017-03-08 | |||
| JP5151065B2 | 2013-02-27 | |||
| JP4984117B2 | 2012-07-25 | |||
| JP2018041085A | 2018-03-15 | |||
| JP2019086635A | 2019-06-06 |
Other References:
See also references of EP 3961289A4
Attorney, Agent or Firm:
TAIYO, NAKAJIMA & KATO (JP)
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