Title:
MICROMIRROR DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/218585
Kind Code:
A1
Abstract:
A micromirror device, wherein are provided a mirror part (12), a first actuator (14) in which a pair of semicircular actuator parts (14A, 14B) are arranged surrounding the mirror part (12), a connection part (21) for connecting the mirror part (12) and the first actuator (14) so that the mirror part (12) can rotate on a first axis (a1), a fixing part (20) arranged on the outer periphery of the first actuator (14), and a second actuator (16) in which a pair of meandering actuator parts (16A, 16B) are arranged symmetrically about the first axis (a1) with the first actuator (14) therebetween. In each of the pair of meandering actuator parts (16A, 16B), the longitudinal direction of a rectangular plate-shaped part is arranged in the direction along the first axis (a1), one end of each of the pair of meandering actuator parts (16A, 16B) is respectively connected to the outer periphery of the pair of semicircular actuator parts (14A, 14B), and the other end thereof is connected to the fixing part (20). The actuator parts are each provided with a piezoelectric element (41-46).
Inventors:
NAONO TAKAYUKI (JP)
AOSHIMA KEISUKE (JP)
AOSHIMA KEISUKE (JP)
Application Number:
PCT/JP2020/017848
Publication Date:
October 29, 2020
Filing Date:
April 24, 2020
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
G02B26/10; B81B3/00; G02B26/08
Foreign References:
| JP2016219603A | 2016-12-22 | |||
| JP2015022064A | 2015-02-02 | |||
| JP2010288435A | 2010-12-24 | |||
| JP2012032679A | 2012-02-16 | |||
| JP2017009920A | 2017-01-12 | |||
| JP2016024223A | 2016-02-08 | |||
| JP5151065B2 | 2013-02-27 | |||
| JP4984117B2 | 2012-07-25 | |||
| JP2018041085A | 2018-03-15 | |||
| JP2019086634A | 2019-06-06 | |||
| JP2020076927A | 2020-05-21 |
Other References:
See also references of EP 3998505A4
Attorney, Agent or Firm:
TAIYO, NAKAJIMA & KATO (JP)
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