Title:
MICROMECHANICAL COMPONENTS WITH REDUCED STATIC FRICTION
Document Type and Number:
WIPO Patent Application WO2003031319
Kind Code:
A3
Abstract:
The invention concerns micromechanical components (4'; 40) with reduced static friction having in general a size less than 1 mm, devices comprising said components, the manufacture and use of said components, as well as a method for treating the surfaces of micromechanical components (4'; 40). Said method consists in modifying by a surface treatment faulty electronic regions of the semiconductor material used. The inventive components are used for example in acceleration sensors.
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Inventors:
FISCHER FRANK (DE)
RUMP ARNOLD (DE)
RUMP ARNOLD (DE)
Application Number:
PCT/DE2002/003317
Publication Date:
October 09, 2003
Filing Date:
September 06, 2002
Export Citation:
Assignee:
BOSCH GMBH ROBERT (DE)
MAX PLANCK GESELLSCHAFT (DE)
FISCHER FRANK (DE)
RUMP ARNOLD (DE)
MAX PLANCK GESELLSCHAFT (DE)
FISCHER FRANK (DE)
RUMP ARNOLD (DE)
International Classes:
B81B3/00; (IPC1-7): B81B3/00
Domestic Patent References:
| WO2001057920A1 | 2001-08-09 |
Foreign References:
| US5025346A | 1991-06-18 | |||
| US6290859B1 | 2001-09-18 | |||
| US5694740A | 1997-12-09 |
Other References:
ABE T ET AL: "Effects of elevated temperature treatments in microstructure release procedures", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, JUNE 1995, USA, vol. 4, no. 2, pages 66 - 75, XP002247902, ISSN: 1057-7157
KOMVOPOULOS K: "SURFACE ENGINEERING AND MICROTRIBOLOGY FOR MICROELECTROMECHNICAL SYSTEMS", WEAR, LAUSANNE, CH, vol. 200, 1996, pages 305 - 327, XP001090868
SRINIVASAN U ET AL: "Self-assembled fluorocarbon films for enhanced stiction reduction", 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, TRANSDUCERS 97, CHICAGO, IL, JUNE 16 - 19, 1997. SESSIONS 3A1 - 4D3. PAPERS NO. 3A1.01 - 4D3.14P,, ISBN: 0-7803-3829-4, XP010240746
SCHEEPER P R ET AL: "INVESTIGATION OF ATTRACTIVE FORCES BETWEEN PECVD SILICON NITRIDE MICROSTRUCTURES AND AN OXIDIZED SILICON SUBSTRATE", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. A30, no. 3, 1 February 1992 (1992-02-01), pages 231 - 239, XP000277434, ISSN: 0924-4247
LEGTENBERG R ET AL: "STICTION OF SURFACE MICROMACHINED STRUCTURES AFTER RINSING AND DRYING: MODEL AND INVESTIGATION OF ADHESION MECHANISMS", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. A43, no. 1/3, 1 May 1994 (1994-05-01), pages 230 - 238, XP000454116, ISSN: 0924-4247
KOMVOPOULOS K: "SURFACE ENGINEERING AND MICROTRIBOLOGY FOR MICROELECTROMECHNICAL SYSTEMS", WEAR, LAUSANNE, CH, vol. 200, 1996, pages 305 - 327, XP001090868
SRINIVASAN U ET AL: "Self-assembled fluorocarbon films for enhanced stiction reduction", 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, TRANSDUCERS 97, CHICAGO, IL, JUNE 16 - 19, 1997. SESSIONS 3A1 - 4D3. PAPERS NO. 3A1.01 - 4D3.14P,, ISBN: 0-7803-3829-4, XP010240746
SCHEEPER P R ET AL: "INVESTIGATION OF ATTRACTIVE FORCES BETWEEN PECVD SILICON NITRIDE MICROSTRUCTURES AND AN OXIDIZED SILICON SUBSTRATE", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. A30, no. 3, 1 February 1992 (1992-02-01), pages 231 - 239, XP000277434, ISSN: 0924-4247
LEGTENBERG R ET AL: "STICTION OF SURFACE MICROMACHINED STRUCTURES AFTER RINSING AND DRYING: MODEL AND INVESTIGATION OF ADHESION MECHANISMS", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. A43, no. 1/3, 1 May 1994 (1994-05-01), pages 230 - 238, XP000454116, ISSN: 0924-4247
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