Title:
MICROMECHANICAL SENSOR UNIT FOR DETECTING ACCELERATION
Document Type and Number:
WIPO Patent Application WO/1995/027217
Kind Code:
A1
Abstract:
A micromechanical sensor unit for detecting acceleration has at least one pendulum with a spiral spring (B) and a seismic mass (P), a support (E) for each pendulum and at least two position feelers (S). Each position sensor (S) and its pendulum form a switch with a defined triggering threshold and at least two switches respond to the same direction of acceleration. To each switch is allocated a measuring resistor (R), these measuring resistors (R) forming a resistor network with a node to receive a quasi-analog acceleration signal (a).
Inventors:
MADER GERHARD (DE)
NOETZEL JENS (DE)
SCHULZE STEFFEN (DE)
NOETZEL JENS (DE)
SCHULZE STEFFEN (DE)
Application Number:
PCT/DE1995/000431
Publication Date:
October 12, 1995
Filing Date:
March 30, 1995
Export Citation:
Assignee:
SIEMENS AG (DE)
MADER GERHARD (DE)
NOETZEL JENS (DE)
SCHULZE STEFFEN (DE)
MADER GERHARD (DE)
NOETZEL JENS (DE)
SCHULZE STEFFEN (DE)
International Classes:
G01P15/00; G01P15/08; G01P15/135; G01P21/00; (IPC1-7): G01P15/135
Foreign References:
| US4855544A | 1989-08-08 | |||
| DE266841C | ||||
| EP0567938A1 | 1993-11-03 |
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