Title:
MIXER AND VACUUM PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/061498
Kind Code:
A1
Abstract:
Provided are: a mixer for evenly mixing a first gas and a second gas; and a vacuum processing device using the mixer. A second cylinder body 12 is arranged in the interior of a first cylinder body 11 in a non-contact manner with one another so that a second cylinder opening 46 is located inside the first cylinder body 11; an approach run space 48 is formed between a first cylinder opening 45 and the second cylinder opening 46 inside the first cylinder body 11; a second gas is discharged to the approach run space 48 from the second cylinder opening 46; a first gas is discharged to the approach run space 48 from a gap 47 formed between the first and second cylinder bodies 11, 12; the first and second gases are made to flow into the approach run space 48 in a state where the second gas is wrapped in the first gas, and discharged to the interior of a mixing vessel 10 from the first cylinder opening 45; the first and second gases travel straight through the mixing vessel 10 and collide with a wall surface of the mixing vessel 10 facing the first cylinder opening 45, thereby forming a vortex of the first and second gases; and as a result, the first and second gases are uniformly mixed even when there is a large difference in the flow rates between the first and second gases supplied to the mixing vessel 10.
Inventors:
TAMIYA SHINTARO (JP)
JINBO YOSUKE (JP)
ABE YOICHI (JP)
JINBO YOSUKE (JP)
ABE YOICHI (JP)
Application Number:
PCT/JP2016/079681
Publication Date:
April 13, 2017
Filing Date:
October 05, 2016
Export Citation:
Assignee:
ULVAC INC (JP)
International Classes:
C23C16/455; B01F23/10; H01L21/31
Foreign References:
| JPH0341846U | 1991-04-22 | |||
| JP2011056400A | 2011-03-24 | |||
| JPH01129973A | 1989-05-23 |
Attorney, Agent or Firm:
ISHIJIMA Shigeo et al. (JP)
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